Inverse Scattering Module

The conventional measurement algorithms used for linewidth measurement on CD SEMS do not rigorously account for the physics principles that underlie the image formation. To correct for the physics influence, measurement algorithms can be developed which are based directly on scan data or simulated images. One approach is called the Inverse Scattering Method and determines measurements by searching a database of simulations for the best fit. Spectel has undertaken a refinement of this approach termed Adaptive Monte Carlo Inverse Scattering (AMCIS). AMCIS allows the Monte Carlo model to adjust to real experimental data.

ADAPTIVE Monte Carlo- Inverse Scattering Approach to SEM Measurement Developed by Spectel Company