Sharpness Analysis

Based on NIST research, this analysis provides estimates of sharpness and beam eccentricity, provides feedback for adjusting SEMs and has a database for storing results. It can quantifying vibration, noise and the relative degree of granularity of a specimen. Additionally, it can be used with optical microscopes to measure and quantify resolution and asymmetry in the imaging optics as well as qualifying objective lenses or stepper lenses.