Turnkey Workstation

SEM Monitor software has been integrated into a turnkey workstation which incorporates additional electron beam and optical modeling and characterization capabilities. The workstation includes one year support, installation, training and software upgrades.

The first fully-integrated SEM Monitor workstation was accepted by SEMATECH in the second quarter of 1997.

The turnkey workstation is a high-performance computer.  It also includes frame-grabber electronics compatible with slowscan sources and can interface directly to four imaging tools. The workstation has two modes of operation. Engineering Mode provides full flexibility and Production Mode has limited, simple operation of pre-setup measurements.